The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2014
Filed:
Aug. 10, 2012
Sung-yong Lee, Yongin, KR;
Myung-soo Huh, Yongin, KR;
Choel-min Jang, Yongin, KR;
Cheol-rae JO, Yongin, KR;
In-kyo Kim, Yongin, KR;
Yong-suk Lee, Yongin, KR;
Mi-ra an, Yongin, KR;
Sang-joon Seo, Yongin, KR;
Sung-Yong Lee, Yongin, KR;
Myung-Soo Huh, Yongin, KR;
Choel-Min Jang, Yongin, KR;
Cheol-Rae Jo, Yongin, KR;
In-Kyo Kim, Yongin, KR;
Yong-Suk Lee, Yongin, KR;
Mi-Ra An, Yongin, KR;
Sang-Joon Seo, Yongin, KR;
Samsung Display Co., Ltd., Giheung-Gu, Yongin, Gyeonggi-Do, KR;
Abstract
A thin film depositing apparatus and a thin film depositing method used by the thin film depositing apparatus. The thin film depositing apparatus includes a deposition chamber through which a process gas outlet of a deposition source is arranged; a transfer shuttle disposed in the deposition chamber, the transfer shuttle comprising a mounting plate for loading a substrate, the transfer shuttle being reciprocal with respect to the process gas outlet; and at least one bendable auxiliary plate installed at one side of the transfer shuttle, the bendable auxiliary plate closing the process gas outlet when opposite the process gas outlet, the bendable auxiliary plate comprising a folding member for placing the bendable auxiliary plate in each of an unbent state and bent state dependent upon the position of the transfer shuttle.