The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2014
Filed:
Mar. 08, 2013
Applicants:
Masayuki Kamei, Tsukuba, JP;
Takamasa Ishigaki, Tsukuba, JP;
Inventors:
Masayuki Kamei, Tsukuba, JP;
Takamasa Ishigaki, Tsukuba, JP;
Assignee:
National Institute for Materials Science, Tsukuba-Shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/35 (2006.01); C23C 14/08 (2006.01); H01J 37/34 (2006.01); B01J 37/34 (2006.01); B01J 35/00 (2006.01); B01J 21/06 (2006.01);
U.S. Cl.
CPC ...
C23C 14/351 (2013.01); C23C 14/352 (2013.01); C23C 14/083 (2013.01); H01J 37/3435 (2013.01); B01J 2219/00745 (2013.01); B01J 2219/00754 (2013.01); B01J 2219/00443 (2013.01); C23C 14/35 (2013.01); B01J 37/346 (2013.01); B01J 21/063 (2013.01); B01J 21/06 (2013.01); B01J 35/004 (2013.01); H01J 37/3405 (2013.01); H01J 37/3461 (2013.01); B01J 2219/00527 (2013.01);
Abstract
In a method of switching magnet flux distribution, a magnet is arranged on a rear side of a backing plate with respect to a target holding side thereof in a magnetron sputtering cathode, and placing an article that exhibits ferromagnetism at room temperature on the target holding side of the backing plate or removing the article therefrom so that the magnet flux distribution is switched between a balanced distribution of the magnetic flux and unbalanced distribution of the magnetic flux.