Apparatus for depositing material on elongate substrate

Abstract

Disclosed is a deposition apparatus for depositing a specific substance on an elongate substrate such as an elongate strip of tape or film. The apparatus includes a vacuum chamber, supply reel and the for reel for supplying elongate substrate in rolled form, a drum, disposed in the vacuum chamber, the drum having a helically-shaped guide groove formed along an outer surface of the drum for receiving the elongate substrate supplied from the supply reel to be wound in the guide groove and to subsequently feed the elongate substrate to a retreat reel to wind thereon upon rotation of the drum, and a deposition source material for depositing a material onto a surface of the elongate substrate which is wound on the drum. The apparatus further includes at least one slip-roller disposed adjacent to the drum in a longitudinal direction of the drum, wherein the slip-roller at least partially protrudes outwardly from an outer surface of the drum and being rotated in a moving direction of the elongate substrate such that a portion of the elongated substrate received in the helically-shaped guide groove of the drum is pulled out of contact from the guide groove to reduce a frictional contact there-between as the elongated substrate is fed upon rotation of the drum and the slip-roller.