The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 02, 2014

Filed:

Sep. 10, 2007
Applicants:

Hiroshi Hasegawa, Tokyo, JP;

Tomoharu Kamamura, Tokyo, JP;

Inventors:

Hiroshi Hasegawa, Tokyo, JP;

Tomoharu Kamamura, Tokyo, JP;

Assignee:

Kaijo Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B06B 1/02 (2006.01); B08B 3/04 (2006.01); B08B 3/10 (2006.01); B08B 3/12 (2006.01); H01L 21/67 (2006.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
B06B 1/0238 (2013.01); H01L 21/67057 (2013.01); B08B 3/12 (2013.01); Y10S 134/902 (2013.01);
Abstract

The invention provides an ultrasonic cleaning apparatus in which unevenness of sound pressure among a plurality of oscillating elements is solved by emitting uniform ultrasonic waves, the rate of removal of fine particles is improved, and the uneven cleaning is avoided. The ultrasonic cleaning apparatus includes a cleaning bath that stores an object to be cleaned and cleaning solvent; a plurality of oscillating elements attached to the cleaning bath; a plurality of oscillators connected respectively to the plurality of oscillating elements for exciting the plurality of oscillating elements; and a controller connected to the plurality of oscillators for controlling the plurality of oscillators to output signals having the same phase or substantially the same phase to the plurality of oscillating elements.


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