The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2014
Filed:
Apr. 25, 2012
Isao Matsubara, Utsunomiya, JP;
Chung-chieh Yu, Tucson, AZ (US);
Yasuyuki Unno, Utsunomiya, JP;
William Dallas, Tucson, AZ (US);
Isao Matsubara, Utsunomiya, JP;
Chung-Chieh Yu, Tucson, AZ (US);
Yasuyuki Unno, Utsunomiya, JP;
William Dallas, Tucson, AZ (US);
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An interferometric method for detecting information about a sample includes emitting a laser beam; splitting the laser beam into a reference beam and an object beam; transmitting the object beam through the sample in an incident angle; combining the reference beam with the object beam passed through the sample to form an interference pattern; detecting the interference pattern, and non-linearly scanning the object beam in order to detect a plurality of interference patterns.