The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2014
Filed:
Apr. 10, 2013
Applicant:
Sand 9, Inc., Cambridge, MA (US);
Inventors:
Jan H. Kuypers, Cambridge, MA (US);
Florian Thalmayr, Unterhaching, DE;
Alexei Gaidarzhy, Brighton, MA (US);
Guiti Zolfagharkhani, Brighton, MA (US);
Assignee:
Sand 9, Inc., Cambridge, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/25 (2006.01); H01L 41/047 (2006.01); G03F 7/20 (2006.01); H01L 41/09 (2006.01); H03H 9/13 (2006.01); H03H 3/02 (2006.01);
U.S. Cl.
CPC ...
H01L 41/09 (2013.01); G03F 7/70216 (2013.01); H03H 2003/027 (2013.01); H03H 9/132 (2013.01);
Abstract
Resonator structures and electrodes are described, as well as methods for manufacturing the same. Resonator electrodes may be formed using two or more photolithographic steps and masks, with different masks being used to define different features of the electrodes. The masks may create self-aligned electrodes, which can be aligned with one or more anchors of the resonator.