Field effect transistor having phase transition material incorporated into one or more components for reduced leakage current

Abstract

Disclosed is a metal oxide semiconductor field effect transistor (MOSFET) having phase transition material incorporated into one or more components and an associated method. The MOSFET can comprise an asymmetric gate electrode having a phase transition material section (e.g., a chromium or titanium-doped vanadium dioxide (VO) section) above the drain-side of the channel region. Additionally or alternatively, the MOSFET can comprise source and drain contact landing pads comprising different phase transition materials (e.g., un-doped VOand chromium or titanium-doped VO, respectively). In any case, the phase transition material(s) are pre-selected so as to be insulative when the MOSFET is in the OFF state and the voltage difference between the drain region and the source region (V) is high in order to minimize leakage current and so as to be conductive when the MOSFET is in the ON state and Vis high in order to maintain drive current.