The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 25, 2014

Filed:

Sep. 10, 2013
Applicant:

Georgetown University, Washington, DC (US);

Inventors:

Makarand Paranjape, Silver Spring, MD (US);

Yian Liu, Arlington, VA (US);

Assignee:

Georgetown University, Washington, DC (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); G01N 27/414 (2006.01); H01L 29/66 (2006.01); H01L 29/775 (2006.01);
U.S. Cl.
CPC ...
G01N 27/4146 (2013.01); H01L 29/66439 (2013.01); H01L 29/775 (2013.01); Y10S 438/958 (2013.01);
Abstract

A process for forming a carbon nanotube field effect transistor (CNTFET) device includes site-specific nanoparticle deposition on a CNTFET that has one or more carbon nanotubes, a source electrode, a drain electrode, and a sacrificial electrode on a substrate with an interposed dielectric layer. The process includes control of PMMA removal and electrodeposition in order to select nanoparticle size and deposition location down to singular nanoparticle deposition. The CNTFET device resulting in ultra-sensitivity for various bio-sensing applications, including detection of glucose at hypoglycemic levels.


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