The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2014
Filed:
Mar. 24, 2014
Applicant:
Samsung Electronics Co., Ltd., Suwon-Si, KR;
Inventors:
Hyun-Woo Kim, Seongnam-si, KR;
Hai-Sub Na, Seoul, KR;
Chil-Hee Chung, Seoul, KR;
Han-Ku Cho, Seongnam-Si, KR;
Assignee:
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G03F 7/038 (2006.01); G03F 7/095 (2006.01); G03F 7/11 (2006.01); G02B 5/20 (2006.01); G02B 5/22 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0388 (2013.01); G03F 7/095 (2013.01); G03F 7/11 (2013.01); G02B 5/208 (2013.01); G02B 5/22 (2013.01);
Abstract
Provided are a coating composition for deep ultraviolet (DUV) filtering during an extreme ultraviolet (EUV) exposure, the coating composition including about 100 parts by weight of a solvent including a first solvent (the first solvent being an alcoholic solvent); and about 0.05 parts by weight to about 5 parts by weight of a coating polymer having a degree of absorption of about 50%/μm or greater with respect to 193-nm incident light.