The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2014
Filed:
Nov. 19, 2012
Applicants:
Masato Suzuki, Kanagawa-ken, JP;
Tetsuro Nakasugi, Kanagawa-ken, JP;
Inventors:
Masato Suzuki, Kanagawa-ken, JP;
Tetsuro Nakasugi, Kanagawa-ken, JP;
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/62 (2012.01); G03F 1/64 (2012.01); G03F 1/68 (2012.01);
U.S. Cl.
CPC ...
G03F 1/62 (2013.01); G03F 1/68 (2013.01);
Abstract
An aspect of the present embodiment, there is provided a method for fabricating a pellicle, including acquiring a shape of a pellicle frame, deciding a thickness distribution of an adhesive to be coated on the pellicle frame on a basis of the acquired shape of the pellicle frame, and coating the adhesive on the pellicle frame based on the decision of the thickness distribution.