The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2014
Filed:
Jun. 08, 2012
Kevin M. Bourbeau, Pepperell, MA (US);
Eric C. Beishline, Marlborough, MA (US);
Michael J. Amirto, Ashburnham, MA (US);
Gino A. Pinto, Milford, MA (US);
Benjamin F. Fontaine, Lunenburg, MA (US);
Kevin M. Bourbeau, Pepperell, MA (US);
Eric C. Beishline, Marlborough, MA (US);
Michael J. Amirto, Ashburnham, MA (US);
Gino A. Pinto, Milford, MA (US);
Benjamin F. Fontaine, Lunenburg, MA (US);
Setra Systems, Inc., Boxborough, MA (US);
Abstract
A pressure sensor () useful as a vacuum manometer. A reference pressure cavity () of the sensor is evacuated through an evacuation opening () located behind a plate portion () of the sensor electrode () having a non-planar surface for supporting the diaphragm () during an overpressure event. The electrode is hermetically sealed to the body () of the sensor by a brazed joint with a ceramic seal member () disposed there between. The brazed joint may include a layer of buffer material () which provides a degree of malleability to the joint to avoid cracking of the ceramic seal member. The brazed ceramic/metal joint permits the selection of materials such that differential thermal expansion effects can be passively minimized. The electrode is connected to the sensor circuitry () by a wire having a spring section (), thereby providing a stress free interconnection.