The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2014
Filed:
Jul. 10, 2009
Applicants:
Christof Metzmacher, La Calamine, BE;
Achim Weber, Aachen, DE;
Inventors:
Christof Metzmacher, La Calamine, BE;
Achim Weber, Aachen, DE;
Assignee:
Koninklijke Philips N.V., Eindhoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 27/42 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention relates to an improved EUV generating device having a contamination captor for 'catching' contamination and/or debris caused by corrosion or otherwise unwanted reactions of the tin bath.