The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2014
Filed:
May. 14, 2009
J. Gary Eden, Champaign, IL (US);
Sung-jin Park, Champaign, IL (US);
Taek-lim Kim, Champaign, IL (US);
Kwang-soo Kim, Champaign, IL (US);
J. Gary Eden, Champaign, IL (US);
Sung-Jin Park, Champaign, IL (US);
Taek-Lim Kim, Champaign, IL (US);
Kwang-Soo Kim, Champaign, IL (US);
The Board of Trustees of the University of Illnois, Urbana, IL (US);
Abstract
An array of microcavity plasma devices is formed in a unitary sheet of oxide with embedded microcavities or microchannels and encapsulated metal driving electrodes isolated by oxide from the microcavities or microchannels and arranged so as to generate sustain a plasma in the embedded microcavities or microchannels upon application of time-varying voltage when a plasma medium is contained in the microcavities or microchannels.