The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2014
Filed:
Jan. 28, 2013
Ho Seob Kim, Incheon, KR;
Dae Wook Kim, Seongnam-si, KR;
Seung Jun Ahn, Daejeon, KR;
Tae Sik OH, Cheonam-si, KR;
Ho Seob Kim, Incheon, KR;
Dae Wook Kim, Seongnam-si, KR;
Seung Jun Ahn, Daejeon, KR;
Tae Sik Oh, Cheonam-si, KR;
Industry—University Cooperation Foundation Sunmoon University, Tangjeon-myeon, Asan-si, Chungcheongnam-do, KR;
Abstract
Disclosed herein is a multi-particle beam column including electrode layer with eccentric apertures. The multi-particle beam column includes two or more particle beam columns each comprising a particle beam emission source, a deflector, and two or more electrode layers. The multi-particle beam column includes at least one electrode layer having one or more apertures that are eccentric from respective beam optical axes of the particle beam columns.