The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 18, 2014

Filed:

May. 13, 2013
Applicant:

The Trustees of Columbia University IN the City of New York, New York, NY (US);

Inventors:

James S. Im, New York, NY (US);

Ui-Jin Chung, Rego Park, NY (US);

Alexander B. Limanov, Millburn, NJ (US);

Paul C. Van Der Wilt, New York, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); B23K 26/00 (2014.01); H01L 21/02 (2006.01); H01L 21/268 (2006.01); H01L 27/12 (2006.01);
U.S. Cl.
CPC ...
H01L 21/268 (2013.01); B23K 2201/40 (2013.01); B23K 26/0081 (2013.01); H01L 21/02691 (2013.01); H01L 21/02532 (2013.01); H01L 21/02686 (2013.01); H01L 21/0268 (2013.01); H01L 27/1296 (2013.01); H01L 27/1285 (2013.01);
Abstract

The disclosed systems and method for non-periodic pulse sequential lateral solidification relate to processing a thin film. The method for processing a thin film, while advancing a thin film in a selected direction, includes irradiating a first region of the thin film with a first laser pulse and a second laser pulse and irradiating a second region of the thin film with a third laser pulse and a fourth laser pulse, wherein the time interval between the first laser pulse and the second laser pulse is less than half the time interval between the first laser pulse and the third laser pulse. In some embodiments, each pulse provides a shaped beam and has a fluence that is sufficient to melt the thin film throughout its thickness to form molten zones that laterally crystallize upon cooling. In some embodiments, the first and second regions are adjacent to each other. In some embodiments, the first and second regions are spaced a distance apart.


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