The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 18, 2014

Filed:

Nov. 04, 2009
Applicants:

Heiko Thiem, Haltern am See, DE;

Juergen Steiger, Duesseldorf, DE;

Alexey Merkulov, Ludwigshafen, DE;

Duy VU Pham, Oberhausen, DE;

Yilmaz Aksu, Berlin, DE;

Stefan Schutte, Berlin, DE;

Matthias Driess, Berlin, DE;

Inventors:

Heiko Thiem, Haltern am See, DE;

Juergen Steiger, Duesseldorf, DE;

Alexey Merkulov, Ludwigshafen, DE;

Duy Vu Pham, Oberhausen, DE;

Yilmaz Aksu, Berlin, DE;

Stefan Schutte, Berlin, DE;

Matthias Driess, Berlin, DE;

Assignee:

Evonik Degussa GmbH, Essen, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/36 (2006.01); C23C 18/12 (2006.01);
U.S. Cl.
CPC ...
C23C 18/1216 (2013.01); C23C 18/1223 (2013.01); C23C 18/1245 (2013.01); C23C 18/122 (2013.01); C23C 18/1295 (2013.01);
Abstract

The present invention relates to formulations comprising a) at least two different ZnO cubanes of which at least one ZnO cubane is present in solid form under SATP conditions and at least one ZnO cubane is present in liquid form under SATP conditions, and b) at least one solvent, to processes for producing semiconductive ZnO layers from these formulations, to the use of the formulations for producing electronic components and to the electronic components themselves.


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