The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2014
Filed:
May. 08, 2013
Applicants:
Kyung-soo Kim, Yongin, KR;
Seong-ho Jeong, Yongin, KR;
Hyun-keun Song, Yongin, KR;
Eu-gene Kang, Yongin, KR;
Inventors:
Kyung-Soo Kim, Yongin, KR;
Seong-Ho Jeong, Yongin, KR;
Hyun-Keun Song, Yongin, KR;
Eu-Gene Kang, Yongin, KR;
Assignee:
Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/54 (2006.01); B05C 11/00 (2006.01); C23C 16/00 (2006.01); H01L 21/00 (2006.01); H01L 21/66 (2006.01); H01L 51/00 (2006.01); C23C 16/52 (2006.01); H01L 21/67 (2006.01); B05B 12/08 (2006.01);
U.S. Cl.
CPC ...
H01L 22/12 (2013.01); H01L 51/0008 (2013.01); C23C 16/52 (2013.01); C23C 14/543 (2013.01); H01L 22/20 (2013.01); H01L 22/26 (2013.01); H01L 21/67253 (2013.01); B05B 12/084 (2013.01); C23C 14/542 (2013.01); C23C 14/546 (2013.01);
Abstract
A deposition amount measuring apparatus includes a plate-shaped body having a rotating shaft, a plurality of deposition amount sensors along side surfaces of the body, the deposition amount sensors being configured to measure an amount of deposition material, and a housing surrounding the body, the housing including an inflow port that exposes one of the deposition amount sensors.