The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2014
Filed:
Dec. 27, 2012
Applicant:
Samsung Display Co., Ltd., Yongin, KR;
Inventors:
Jong-Hyun Choung, Hwaseong-si, KR;
In-Bae Kim, Yongin-si, KR;
Seon-II Kim, Seoul, KR;
Hong Sick Park, Suwon-si, KR;
Jae Woo Jeong, Incheon, KR;
Gyu-Po Kim, Hwaseong-si, KR;
Won-Guk Seo, Suwon-si, KR;
Hyun-Cheol Shin, Hwaseong-si, KR;
Ki-Beom Lee, Seoul, KR;
Sam-Young Cho, Anyang-si, KR;
Seung-Yeon Han, Yongin-si, KR;
Assignee:
Samsung Display Co., Ltd., Yongin, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C09K 13/04 (2006.01); H01L 21/48 (2006.01); C23F 1/26 (2006.01); C23F 1/18 (2006.01);
U.S. Cl.
CPC ...
C23F 1/18 (2013.01); H01L 21/4814 (2013.01); C23F 1/26 (2013.01);
Abstract
A metal wire etchant including persulfate, a sulfonate, a fluorine compound, an azole-based compound, an organic acid, a nitrate, and a chlorine compound, and a method of making the same.