The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 18, 2014

Filed:

Mar. 31, 2011
Applicants:

Qian Guo, Fremont, CA (US);

Mark Smura, Palo Alto, CA (US);

Michael Joseph Stirniman, Fremont, CA (US);

Hamid Riahi Samani, Los Altos, CA (US);

Inventors:

Qian Guo, Fremont, CA (US);

Mark Smura, Palo Alto, CA (US);

Michael Joseph Stirniman, Fremont, CA (US);

Hamid Riahi Samani, Los Altos, CA (US);

Assignee:

Seagate Technology LLC, Cupertino, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 14/56 (2006.01);
U.S. Cl.
CPC ...
C23C 14/564 (2013.01);
Abstract

An apparatus for collecting condensed vapor during physical vapor deposition includes an enclosure configured to be placed adjacent to one or more vapor sources in a vacuum chamber. The enclosure includes an internal surface of the enclosure partially enclosing a volume of space configured to receive an object wherein the enclosure is maintained at a cooler temperature than the one or more vapor sources. The internal surface of the enclosure is coupled to one or more drainage gutters drainage drainage gutters.


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