The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2014
Filed:
Sep. 15, 2009
Masato Hamade, Machida, JP;
Tsutomu Yoshida, Gojo, JP;
Nobuhiro Yoshida, Gojo, JP;
Kazuaki Tsuji, Machida, JP;
Masato Hamade, Machida, JP;
Tsutomu Yoshida, Gojo, JP;
Nobuhiro Yoshida, Gojo, JP;
Kazuaki Tsuji, Machida, JP;
Nippon Valqua Industries, Ltd., Tokyo, JP;
Abstract
In a vacuum gate valve, a seal member for sealing a gate opening part is bonded to an outer edge part of a planar seal plate that is disposed in such a manner that the planar seal plate is opposed to a valve seat surface of the gate opening part and comes into contact with the valve seat surface. The seal member includes a vacuum seal part that is located on a side farther from the gate opening part and maintains the sealability of the gate opening part when the gate opening part is closed, and also includes a radical seal part that is located on a side closer to the gate opening part and that prevents the seal member from being affected by a treatment gas in the gate opening part when the gate opening part is closed. The vacuum seal part is made of a rubber elastic body, and the radical seal part is configured by providing a radical resistant body that is provided with an excellent radical resistance on the rubber elastic body.