The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2014
Filed:
Jun. 07, 2010
Kenichi Ooshiro, Yokohama, JP;
Tsuyoshi Sato, Yokohama, JP;
Takao Tokumoto, Sasayama, JP;
Sadao Natsu, Ikoma, JP;
Souichirou Iwasaki, Sakai, JP;
Kenichi Ooshiro, Yokohama, JP;
Tsuyoshi Sato, Yokohama, JP;
Takao Tokumoto, Sasayama, JP;
Sadao Natsu, Ikoma, JP;
Souichirou Iwasaki, Sakai, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Chugai Ro Co., Ltd., Osaka-shi, JP;
Abstract
According to one embodiment, a film forming system includes: a stage including a placement surface on which an object to be coated is placed; a rotating mechanism rotating the stage in a rotational direction along the placement surface; an application nozzle discharging a material onto the object placed on the stage for application; a moving mechanism relatively moving the stage and the application nozzle along the placement surface in a cross direction crossing the rotational direction; a controller performing a control to rotate the stage on which the object is placed through the rotating mechanism while relatively moving the stage and application nozzle along the placement surface in the cross direction through the moving mechanism and applying the material to the object on the stage through the application nozzle; and a cleaning apparatus cleaning the application nozzle.