The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2014
Filed:
Sep. 29, 2011
Ryo Yamada, Kyoto, JP;
Satoru Yasaka, Kyoto, JP;
Ryo Yamada, Kyoto, JP;
Satoru Yasaka, Kyoto, JP;
SCREEN Holdings Co., Ltd., , JP;
Abstract
Correction values (ΔXto ΔX) at the X position (X=xe) of a target point (E (xe, ye)) are calculated by calculating the amounts of shift (ΔX) in the positions of alignment marks (Mto M, Mto M, Mto M, Mto M) in the X direction and plotting first spline curves (SL) using the amounts of shift. Then, a first sub-spline curve (SLS) is plotted using the correction values (ΔXto ΔX) in order to calculate a correction value (ΔXe) at the Y position (Y=ye) of the target point (E (xe, ye)), and the calculated correction value is taken as the correction amount in the X direction. The correction amount in the Y direction is also calculated in the same manner.