The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2014
Filed:
Jan. 26, 2012
Abdul Jaleel K. Moidu, Nepean, CA;
John Michael Miller, Gatineau, CA;
Abdul Jaleel K. Moidu, Nepean, CA;
John Michael Miller, Gatineau, CA;
JDS Uniphase Corporation, Milpitas, CA (US);
Abstract
A multi-layer hidden hinge and actuator design for high fill factor biaxial MEMS mirror array for wavelength selective switches (WSS) including a coarsely aligned orthogonal vertical comb drive and/or parallel plate actuator. Each micro-mirror in the MEMS linear piano micro-mirror array comprises a reflective body/mirror layer, a ground/hinge layer and a hot electrode/substrate layer. To increase the amount of surface area available for the hot and ground electrodes, the dimensions of the ground/hinge layer are extended longitudinally or laterally across the air gap between reflective layers to beneath the adjacent reflective layer. Ideally, diffraction patterns are formed on the surface of the ground/hinge layer to prevent stray light from reflecting back into the system.