The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2014
Filed:
Nov. 05, 2007
Applicants:
Markus Winterhalter, Bad Krozingen, DE;
Ekkehard Mann, Gundelfingen, DE;
Inventors:
Markus Winterhalter, Bad Krozingen, DE;
Ekkehard Mann, Gundelfingen, DE;
Assignee:
TRUMPF Huettinger GmbH + Co. KG, Freiburg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B 31/26 (2006.01); H05H 1/46 (2006.01);
U.S. Cl.
CPC ...
H05H 1/46 (2013.01);
Abstract
For driving at least two HF power generators that supply a plasma process with HF power, at least one drive signal is generated and at least one pulse signal is generated. Then, based on the at least one drive signal and the at least one pulse signal, a pulsed HF power signal is generated by each of the at least two HF power generator.