The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2014
Filed:
Aug. 06, 2012
Applicants:
Toshinari Noda, Osaka, JP;
Takashi Kubo, Osaka, JP;
Hisao Suzuki, Aichi, JP;
Naoki Wakiya, Tokyo, JP;
Naonori Sakamoto, Shizuoka, JP;
Inventors:
Toshinari Noda, Osaka, JP;
Takashi Kubo, Osaka, JP;
Hisao Suzuki, Aichi, JP;
Naoki Wakiya, Tokyo, JP;
Naonori Sakamoto, Shizuoka, JP;
Assignee:
Panasonic Corporation, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/047 (2006.01); H01L 41/08 (2006.01); H01L 41/187 (2006.01);
U.S. Cl.
CPC ...
H01L 41/047 (2013.01); H01L 41/0478 (2013.01); H01L 41/081 (2013.01); H01L 41/1876 (2013.01);
Abstract
A piezoelectric element includes a substrate, a lower electrode layer, a piezoelectric layer, and an upper electrode layer. The lower electrode layer is fixed to the substrate and the piezoelectric layer is formed on the lower electrode layer. The upper electrode layer is formed on piezoelectric layer. The lower electrode layer contains pores therein and has a larger thermal expansion coefficient than the piezoelectric layer.