The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2014
Filed:
Sep. 11, 2012
Yoshihisa Yamashita, Kyoto, JP;
Kulbinder Kumar Banger, Cambridgeshire, GB;
Henning Sirringhaus, Cambridgeshire, GB;
Yoshihisa Yamashita, Kyoto, JP;
Kulbinder Kumar Banger, Cambridgeshire, GB;
Henning Sirringhaus, Cambridgeshire, GB;
Panasonic Corporation, Osaka, JP;
Cambridge Enterprise Ltd., Cambridgeshire, GB;
Abstract
One aspect in the present disclosure relates to a method for manufacturing an amorphous metal oxide semiconductor. In an exemplary embodiment, a film is deposited on a substrate from a mixed solution as a starting element. For example, the mixed solution includes at least an indium alkoxide and a zinc alkoxide in a solvent. The film made from the mixed solution on the substrate is cured by thermal-annealing in a water vapor atmosphere, at a temperature range of, for example, 210 to 275 degrees Celsius, inclusive.