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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8883565 B1

PDFFull Text
Date of Patent:
Nov. 11, 2014

Filed:

Oct. 04, 2011

Separation of semiconductor devices from a wafer carrier

Applicants:

Mathias Vaupel, Regensburg, DE;

Sebastian Bernrieder, Regensburg, DE;

Adolf Koller, Regensburg, DE;

Stefan Martens, Munich, DE;

Inventors:

Mathias Vaupel, Regensburg, DE;

Sebastian Bernrieder, Regensburg, DE;

Adolf Koller, Regensburg, DE;

Stefan Martens, Munich, DE;

Assignee:

Infineon Technologies AG, Neubiberg, DE;

Attorney:

Slater & Matsil, L.L.P.

Primary Examiner:

Ajay K Arora

Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/78 (2006.01); H01L 21/683 (2006.01); H01L 21/67 (2006.01); H01L 21/50 (2006.01); H01L 21/56 (2006.01); H01L 23/31 (2006.01);
U.S. Cl.
CPC ...
H01L 21/78 (2013.01); H01L 2924/0002 (2013.01); H01L 21/565 (2013.01); H01L 21/683 (2013.01); H01L 21/67 (2013.01); H01L 21/561 (2013.01); H01L 21/50 (2013.01); H01L 21/568 (2013.01); H01L 23/3107 (2013.01);
Abstract

In accordance with an embodiment of the present invention, a semiconductor device is manufactured by arranging a plurality of semiconductor devices on a frame with an adhesive foil. The plurality of semiconductor devices is attached to the adhesive foil. The plurality of semiconductor devices is removed from the frame with the adhesive foil using a carbon dioxide snow jet and/or a laser process.

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Vaupel, Mathias. (2014). Separation of semiconductor devices from a wafer carrier (U.S. Patent No. 8883565). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8883565

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