The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8883523 B1

PDF
Full Text
Expired
Date of Patent:
Nov. 11, 2014

Filed:

May. 13, 2011
Applicants:

Jian Guo, Beijing, CN;

Weifeng Zhou, Beijing, CN;

Xing Ming, Beijing, CN;

Inventors:

Jian Guo, Beijing, CN;

Weifeng Zhou, Beijing, CN;

Xing Ming, Beijing, CN;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2014.01); G01R 27/26 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70658 (2013.01); G03F 7/70633 (2013.01); G03F 7/70683 (2013.01);
Abstract

A method for detecting a patter offset amount of exposed regions comprises forming at least one pair of conductive detecting marks with a predetermined position relationship by a patterning process including two exposing processes; detecting an electrical characteristic of the at least one pair conductive detecting marks, if the detected electrical characteristic does not meet a predetermined position relationship, it is determined that the pattern offset amount of the exposed regions in two exposure steps is not qualified; and if the detected electrical characteristic meets the predetermined position relationship, it is determined that the pattern offset amount of the exposed regions in two exposure steps is qualified.


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Guo, Jian. (2014). Method for detecting pattern offset amount of exposed regions and detecting mark (U.S. Patent No. 8883523). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8883523

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