The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2014
Filed:
Jun. 09, 2009
Yun-mo Chung, Yongin, KR;
Min-jae Jeong, Yongin, KR;
Jong-won Hong, Yongin, KR;
Eu-gene Kang, Yongin, KR;
Heung-yeol NA, Yongin, KR;
Ki-yong Lee, Yongin, KR;
Yun-Mo Chung, Yongin, KR;
Min-Jae Jeong, Yongin, KR;
Jong-Won Hong, Yongin, KR;
Eu-Gene Kang, Yongin, KR;
Heung-Yeol Na, Yongin, KR;
Ki-Yong Lee, Yongin, KR;
Samsung Display Co., Ltd., Youngin, KR;
Abstract
A magnetron unit moving apparatus for preventing magnetization and magnetron sputtering equipment having the same. The magnetron unit moving apparatus includes a magnetron unit disposed adjacent to a target, to generate a specific magnetic field, and a movement unit to space the magnetron unit and the target apart such that a strength of a magnetic field generated over the target is within a predetermined reference strength range. It is possible to space the target and the magnetron unit apart so as to prevent the target from being magnetized when a process is not performed.