The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2014
Filed:
Sep. 24, 2011
Applicants:
Hyun-sook Park, Yongin, KR;
Chang-mog JO, Yongin, KR;
Yun-mi Lee, Yongin, KR;
Seok-rak Chang, Yongin, KR;
Inventors:
Hyun-Sook Park, Yongin, KR;
Chang-Mog Jo, Yongin, KR;
Yun-Mi Lee, Yongin, KR;
Seok-Rak Chang, Yongin, KR;
Assignee:
Samsung Display Co., Ltd., Yongin-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 14/04 (2006.01); H01L 21/67 (2006.01); C23C 14/12 (2006.01); H01L 51/00 (2006.01); B05D 1/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67173 (2013.01); C23C 14/042 (2013.01); H01L 21/67207 (2013.01); C23C 14/12 (2013.01); B05D 1/60 (2013.01); H01L 51/0005 (2013.01);
Abstract
An organic layer deposition apparatus capable of reducing or minimizing shifting of a pattern, caused when a patterning slit sheet sags.