Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method

Abstract

A thin film deposition apparatus, a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus, and an organic light-emitting display device manufactured using the method. In the thin film deposition apparatus for forming a thin film on a substrate, the apparatus includes a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a common deposition region at an end of the patterning slit sheet and a plurality of patterning slits on the other end in a second direction perpendicular to the first direction, where each of the plurality of pattering slits includes a plurality of patterning sub slits that are different in length; and a barrier plate assembly disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, and including a plurality of barrier plates that partition a deposition space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces. The thin film deposition apparatus is separated from the substrate by a predetermined distance. The thin film deposition apparatus and the substrate are movable relative to each other.