The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2014
Filed:
Sep. 08, 2011
Goesta Mattausch, Ullersdorf, DE;
Peter Feinaeugle, Heiligenberg, DE;
Volker Kirchhoff, Wehlen, DE;
Dieter Weiske, Dresden, DE;
Henrik Flaske, Dresden, DE;
Rainer Zeibe, Radeburg, DE;
Goesta Mattausch, Ullersdorf, DE;
Peter Feinaeugle, Heiligenberg, DE;
Volker Kirchhoff, Wehlen, DE;
Dieter Weiske, Dresden, DE;
Henrik Flaske, Dresden, DE;
Rainer Zeibe, Radeburg, DE;
Abstract
Device for producing an electron beam includes a housing, which delimits a space that is evacuatable and has an electron beam outlet opening; an inlet structured and arranged for feeding process gas into the space; and a planar cathode and an anode, which are arranged in the space, and between which, a glow discharge plasma is producible by an applied electrical voltage. Ions are accelerateable from the glow discharge plasma onto a surface of the cathode and electrons emitted by the cathode are accelerateable into the glow discharge plasma. The cathode includes a first part made of a first material at least on an emission side, which forms a centrally arranged first surface region of the cathode, and a second part made of a second material, which forms a second surface region of the cathode that encloses the first surface region.