The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2014
Filed:
Feb. 08, 2011
Applicants:
Takafumi Yao, Tsukuba, JP;
Hyun-jae Lee, Gimpo Si, KR;
Katsushi Fujii, Tondabayashi, JP;
Inventors:
Assignee:
AETech Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); H01L 29/04 (2006.01); H01L 21/02 (2006.01); C30B 29/40 (2006.01); C30B 25/18 (2006.01);
U.S. Cl.
CPC ...
C30B 29/403 (2013.01); H01L 21/0262 (2013.01); H01L 21/0254 (2013.01); H01L 21/02433 (2013.01); H01L 21/02658 (2013.01); H01L 21/0242 (2013.01); C30B 25/18 (2013.01);
Abstract
A structural body includes a sapphire underlying substrate; and a semiconductor layer of a group III nitride semiconductor disposed on the underlying substrate. An upper surface of the underlying substrate is a crystal surface tilted at an angle of 0.5° or larger and 4° or smaller with respect to a normal line of an a-plane which is orthogonal to an m-plane and belongs to a {11-20} plane group, from the m-plane which belongs to a {1-100} plane group.