The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2014
Filed:
Feb. 05, 2013
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Edward C. Cooney, III, Jericho, VT (US);
Jeffrey P. Gambino, Westford, VT (US);
Robert K. Leidy, Burlington, VT (US);
Charles F. Musante, South Burlington, VT (US);
John G. Twombly, Essex Junction, VT (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/0232 (2014.01); C23C 16/02 (2006.01); H01L 27/146 (2006.01); C23C 16/505 (2006.01); C23C 16/40 (2006.01); G06F 17/50 (2006.01);
U.S. Cl.
CPC ...
H01L 31/02325 (2013.01); C23C 16/0272 (2013.01); C23C 16/02 (2013.01); H01L 27/14627 (2013.01); H01L 27/14685 (2013.01); C23C 16/505 (2013.01); C23C 16/402 (2013.01); G06F 17/5045 (2013.01);
Abstract
Structures and design structures for improved adhesion of protective layers of imager microlens structures are disclosed. A method of fabricating a semiconductor structure includes forming an interfacial region between a microlens and a protective oxide layer. The interfacial region has a lower concentration of oxygen than the protective oxide layer.