The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8877657 B1

PDF
Full Text
Expired
Date of Patent:
Nov. 04, 2014

Filed:

Apr. 26, 2010
Applicants:

Andrey Karpov, Mannheim, DE;

Friederike Fleischhaker, Niedernhausen, DE;

Imme Domke, Mannheim, DE;

Marcel Kastler, Mainz, DE;

Veronika Wloka, Mannheim, DE;

Lothar Weber, Bielefeld, DE;

Inventors:

Andrey Karpov, Mannheim, DE;

Friederike Fleischhaker, Niedernhausen, DE;

Imme Domke, Mannheim, DE;

Marcel Kastler, Mainz, DE;

Veronika Wloka, Mannheim, DE;

Lothar Weber, Bielefeld, DE;

Assignee:

BASF SE, Ludwigshafen, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01); H01L 29/786 (2006.01); C23C 18/12 (2006.01); H01L 21/02 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
C23C 18/1216 (2013.01); H01L 29/7869 (2013.01); C23C 18/1245 (2013.01); H01L 21/02488 (2013.01); H01L 29/66742 (2013.01); H01L 21/02628 (2013.01); H01L 21/02381 (2013.01); H01L 21/02565 (2013.01); H01L 21/02554 (2013.01);
Abstract

The present invention relates to a process for producing a layer comprising at least one semiconductive metal oxide on a substrate, comprising at least the steps of:


Find Patent Forward Citations

Karpov, Andrey. (2014). Process for producing semiconductive layers (U.S. Patent No. 8877657). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8877657

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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