The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 04, 2014

Filed:

Jan. 26, 2011
Applicants:

Hubert Moriceau, Saint-Egreve, FR;

Pierre Mur, Crolles, FR;

Pierre-jean Ribeyron, Saint Ismier, FR;

Inventors:

Hubert Moriceau, Saint-Egreve, FR;

Pierre Mur, Crolles, FR;

Pierre-Jean Ribeyron, Saint Ismier, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/18 (2006.01); H01L 31/20 (2006.01); H01L 21/306 (2006.01); H01L 31/0236 (2006.01); H01L 31/075 (2012.01);
U.S. Cl.
CPC ...
H01L 21/30604 (2013.01); H01L 31/202 (2013.01); Y02E 10/548 (2013.01); H01L 31/18 (2013.01); H01L 31/02363 (2013.01); H01L 31/075 (2013.01);
Abstract

A method for producing of at least one photovoltaic cell includes successively the anisotropic etching of a surface of a crystalline silicon substrate and the isotropic etching treatment of said surface. The isotropic etching treatment includes at least two successive operations respectively consisting in forming a silicon oxide thin film with a controlled average thickness, ranging between 10 nm and 500 nm and in removing said thin film thus-formed. The operation consisting in forming a silicon oxide thin film on the face of the substrate is carried out by a thermally activated dry oxidation. Such a method makes it possible to improve the surface quality of the surface of the substrate once said surface is etched in an anisotropic way.


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