The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 04, 2014

Filed:

Nov. 27, 2012
Applicant:

Korea Institute of Science and Technology, Seoul, KR;

Inventors:

Jin Seok Kim, Seoul, KR;

Jun-Kyo Francis Suh, Seoul, KR;

Sung Chul Kang, Seoul, KR;

Jeong Hoon Lee, Seoul, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); A61B 5/03 (2006.01); H01L 29/66 (2006.01); H01L 29/84 (2006.01); B82Y 15/00 (2011.01); G01L 7/08 (2006.01); B82Y 99/00 (2011.01);
U.S. Cl.
CPC ...
H01L 29/84 (2013.01); A61B 5/031 (2013.01); H01L 29/66007 (2013.01); A61B 2562/0247 (2013.01); A61B 2562/046 (2013.01); B82Y 15/00 (2013.01); B82Y 99/00 (2013.01); G01L 7/08 (2013.01); Y10S 977/956 (2013.01); Y10S 977/90 (2013.01); Y10S 977/936 (2013.01);
Abstract

The present disclosure relates to a pressure sensor having a nanostructure and a method for manufacturing the same. More particularly, it relates to a pressure sensor having a nanostructure attached on the surface of the pressure sensor and thus having improved sensor response time and sensitivity and a method for manufacturing the same. The pressure sensor according to the present disclosure having a nanostructure includes: a substrate; a source electrode and a drain electrode arranged on the substrate with a predetermined spacing; a flexible sensor layer disposed on the source electrode and the drain electrode; and a nanostructure attached on the surface of the flexible sensor layer and having nanosized wrinkles.


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