The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2014
Filed:
Jan. 25, 2013
Applicant:
Youtec Co., Ltd., Chiba, JP;
Inventors:
Takeshi Kijima, Chiba, JP;
Yuuji Honda, Chiba, JP;
Haruhito Hayakawa, Chiba, JP;
Takekazu Shigenai, Chiba, JP;
Assignee:
Youtec Co., Ltd, Chiba, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 41/187 (2006.01); H01L 41/319 (2013.01); H01L 41/39 (2013.01); H01L 41/318 (2013.01);
U.S. Cl.
CPC ...
H01L 41/39 (2013.01); H01L 41/1876 (2013.01); H01L 41/319 (2013.01); H01L 41/1873 (2013.01); H01L 41/318 (2013.01);
Abstract
A method for manufacturing a ferroelectric film including the steps of forming a burnable material film containing hydrogen of not less than 1% by weight on a substrate; forming an amorphous thin film including a ferroelectric material on the burnable material film; and oxidizing and crystallizing the amorphous thin film while supplying hydrogen to the amorphous thin film by burning the burnable material film through heating of the burnable material film and the amorphous thin film in an oxygen atmosphere, to thereby form a first ferroelectric film on the substrate.