The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 04, 2014

Filed:

Jun. 22, 2012
Applicants:

Liming Zhang, Greer, SC (US);

Hong Zhou, Shanghai, CN;

Yanping Liu, Shanghai, CN;

Inventors:

Liming Zhang, Greer, SC (US);

Hong Zhou, Shanghai, CN;

Yanping Liu, Shanghai, CN;

Assignee:

General Electric Company, Schenectady, NY (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23F 1/46 (2006.01); C23F 1/16 (2006.01); H01L 21/67 (2006.01); C23F 1/08 (2006.01);
U.S. Cl.
CPC ...
C23F 1/46 (2013.01); C23F 1/16 (2013.01); H01L 21/67086 (2013.01); C23F 1/08 (2013.01);
Abstract

A method for refreshing an acid bath solution includes determining a concentration of phosphoric acid in the acid bath solution and determining a concentration of hydrochloric acid in the acid bath solution. The method further includes calculating a volume of phosphoric acid to add to the acid bath solution to achieve a predetermined concentration of phosphoric acid in the acid bath solution. In addition, the method includes calculating a volume of hydrochloric acid to add to the acid bath solution with the volume of phosphoric acid to increase the acid bath solution to a predetermined volume, and adding the volume of phosphoric acid and the volume of hydrochloric acid to the acid bath solution.


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