The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 04, 2014

Filed:

May. 17, 2012
Applicant:

Victor B. Kley, Berkeley, CA (US);

Inventor:

Victor B. Kley, Berkeley, CA (US);

Assignee:

Metadigm LLC, Berkeley, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); B44C 1/22 (2006.01); B81C 99/00 (2010.01); B81C 3/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00547 (2013.01); B81C 99/009 (2013.01); B81C 99/0085 (2013.01); B81C 3/005 (2013.01); B81C 2203/054 (2013.01); B81C 99/004 (2013.01);
Abstract

A method of making a mold includes forming spaced mold cavities in a mold body. The mold cavities include geometrically similar portions, but have respective depths below an initial reference surface that vary as a function of position along a particular direction. The mold cavities can be formed using anisotropic etching of preferred crystal directions in single crystal materials such as silicon. A portion of the mold material adjacent the initial reference surface is removed to expose a new reference surface at a tilt angle with respect to the initial reference surface. The modified mold cavities have their respective axes at a new desired tilt angle relative to the new reference surface.


Find Patent Forward Citations

Loading…