The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2014
Filed:
Sep. 25, 2008
Seigi Suh, Cary, NC (US);
Esther Kim, Cary, NC (US);
William J. Borland, Chapel Hill, NC (US);
Christopher Allen Gross, Raleigh, NC (US);
Omega N. Mack, Durham, NC (US);
Timothy R. Overcash, Apex, NC (US);
Seigi Suh, Cary, NC (US);
Esther Kim, Cary, NC (US);
William J. Borland, Chapel Hill, NC (US);
Christopher Allen Gross, Raleigh, NC (US);
Omega N. Mack, Durham, NC (US);
Timothy R. Overcash, Apex, NC (US);
CDA Processing Limited Liability Company, Wilmington, DE (US);
Abstract
Disclosed are methods of making a dielectric on a metal foil, and a method of making a large area capacitor that includes a dielectric on a metal foil. A first dielectric layer is formed over the metal foil by physical vapor deposition, and a dielectric precursor layer is formed over the first dielectric layer by chemical solution deposition. The metal foil, first dielectric layer and dielectric precursor layer are prefired at a prefiring temperature in the range of 350 to 650° C. The prefired dielectric precursor layer, the first dielectric layer and the base metal foil are subsequently fired at a firing temperature in the range of 700 to 1200° C.