The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2014
Filed:
Mar. 09, 2011
Applicants:
Bassam A. Saadany, Nasr, EG;
Amr N. Hafez, Cairo, EG;
Mostafa Medhat, Heliopolis, EG;
Hisham Haddara, Heliopolis, EG;
Inventors:
Bassam A. Saadany, Nasr, EG;
Amr N. Hafez, Cairo, EG;
Mostafa Medhat, Heliopolis, EG;
Hisham Haddara, Heliopolis, EG;
Assignee:
Si-Ware Systems, Cairo, EG;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G01B 7/06 (2006.01); G01B 9/02 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0841 (2013.01); G01B 7/08 (2013.01); G01B 9/02071 (2013.01);
Abstract
A Micro Electro-Mechanical System (MEMS) interferometer system utilizes a capacitive sensing circuit to determine the position of a moveable mirror. An electrostatic MEMS actuator is coupled to the moveable mirror to cause a displacement thereof. The capacitive sensing circuit senses the current capacitance of the MEMS actuator and determines the position of the moveable mirror based on the current capacitance of the MEMS actuator.