The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2014
Filed:
Jun. 12, 2012
Applicants:
Hidetoshi Nakanishi, Kyoto, JP;
Masayoshi Tonouchi, Suita, JP;
Iwao Kawayama, Suita, JP;
Inventors:
Assignees:
Dainippon Screen Mfg. Co., Ltd., Kyoto, JP;
Osaka University, Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/35 (2014.01); G01N 21/95 (2006.01); G01N 21/956 (2006.01); G01R 31/26 (2014.01);
U.S. Cl.
CPC ...
G01N 21/3586 (2013.01); G01N 21/9501 (2013.01); G01N 21/956 (2013.01); G01N 21/3563 (2013.01); G01R 31/2605 (2013.01);
Abstract
A technology of inspecting a photoexcited carrier generation area of a photo device in a non-contact manner is provided. An inspection apparatus inspects a photovoltaic cell panel in which the photo device is formed. The inspection apparatus includes an irradiation part that irradiates the photovoltaic cell panel with pulsed light from a light receiving surface side and a detecting part (detector) that detects electric field intensity of a terahertz wave pulse, which is generated according to the irradiation of the pulsed light.