The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 28, 2014

Filed:

Feb. 09, 2011
Applicants:

Satoshi Tokuda, Kusatsu, JP;

Koichi Tanabe, Uji, JP;

Toshinori Yoshimuta, Takatsuki, JP;

Hiroyuki Kishihara, Kizugawa, JP;

Masatomo Kaino, Kyoto-fu, JP;

Akina Yoshimatsu, Osaka, JP;

Toshiyuki Sato, Kyoto, JP;

Shoji Kuwabara, Ibaraki, JP;

Inventors:

Satoshi Tokuda, Kusatsu, JP;

Koichi Tanabe, Uji, JP;

Toshinori Yoshimuta, Takatsuki, JP;

Hiroyuki Kishihara, Kizugawa, JP;

Masatomo Kaino, Kyoto-fu, JP;

Akina Yoshimatsu, Osaka, JP;

Toshiyuki Sato, Kyoto, JP;

Shoji Kuwabara, Ibaraki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/20 (2006.01); H01L 31/18 (2006.01); H01L 31/115 (2006.01); H01L 21/02 (2006.01); H01L 31/0296 (2006.01); H01L 27/146 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02573 (2013.01); H01L 31/1832 (2013.01); H01L 31/115 (2013.01); Y02E 10/50 (2013.01); H01L 27/14692 (2013.01); H01L 27/14696 (2013.01); H01L 21/02562 (2013.01); H01L 31/02966 (2013.01); H01L 21/0262 (2013.01); H01L 27/14659 (2013.01);
Abstract

Although Cl (chlorine) is no longer supplied in the course of a first process in which a detecting layer formed by a polycrystalline film or a polycrystalline lamination film by vapor deposition or sublimation is formed, an additional source (e.g., HCl of Cl-containing gas) other than a source is supplied at the start or in the course of the first process. Thus, the detecting layer as the polycrystalline film or the polycrystalline lamination film of CdTe, ZnTe, or CdZnTe can be doped with Cl uniformly in a thickness direction from the start until the end of the first process in film formation. As a result, uniform crystal particles and uniform detection characteristics can be achieved.


Find Patent Forward Citations

Loading…