The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2014
Filed:
Feb. 09, 2012
Applicants:
Ruzhi Zhang, Pennington, NJ (US);
Jihoon Kim, Huntingdon Valley, PA (US);
Bharatkumar K. Patel, Edison, NJ (US);
Elizabeth Wolfer, Bethlehem, PA (US);
Inventors:
Ruzhi Zhang, Pennington, NJ (US);
Jihoon Kim, Huntingdon Valley, PA (US);
Bharatkumar K. Patel, Edison, NJ (US);
Elizabeth Wolfer, Bethlehem, PA (US);
Assignee:
AZ Electronic Materials (Luxembourg) S.A.R.L., Luxembourg, LU;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); G03F 7/11 (2006.01);
U.S. Cl.
CPC ...
Abstract
This invention relates generally to silicon based photoresist compositions that can be used in forming low k dielectric constant materials suitable for use in electronic devices, methods of their use and the electronic devices made therefrom.