The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2014
Filed:
Mar. 22, 2011
Applicant:
Maurizio Paganin, Brussels, BE;
Inventor:
Maurizio Paganin, Brussels, BE;
Assignee:
Solvay SA, Brussels, BE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C01B 7/00 (2006.01); C01B 7/20 (2006.01); C23C 16/44 (2006.01); C25B 15/02 (2006.01); C25B 1/24 (2006.01);
U.S. Cl.
CPC ...
C25B 1/245 (2013.01); C01B 7/20 (2013.01); C23C 16/4405 (2013.01); C25B 15/02 (2013.01); Y02E 60/321 (2013.01);
Abstract
Elemental fluorine is used as etching agent for the manufacture of electronic devices, especially semiconductor devices, micro-electromechanical devices, thin film transistors, flat panel displays and solar panels, and as chamber cleaning agent mainly for plasma-enhanced vapor deposition (PECVD) apparatus. For this purpose, fluorine often is produced on-site. The invention provides a process wherein the contamination of the elemental fluorine with gaseous impurities, such as air or moisture, is prevented by producing it on site and delivering it to the point of use under a pressure higher than ambient pressure.