The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 28, 2014

Filed:

Aug. 20, 2010
Applicants:

Hiroto Fukushima, Tokyo, JP;

Akira Horiguchi, Osaka, JP;

Ken Isobe, Osaka, JP;

Tomonori Miura, Tokyo, JP;

Shoji Nakao, Tokyo, JP;

Inventors:

Hiroto Fukushima, Tokyo, JP;

Akira Horiguchi, Osaka, JP;

Ken Isobe, Osaka, JP;

Tomonori Miura, Tokyo, JP;

Shoji Nakao, Tokyo, JP;

Assignee:

Sumco Corporation, Tokyo, JP;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B24B 37/08 (2012.01); H01L 21/687 (2006.01); B24B 37/04 (2012.01); H01L 21/68 (2006.01); H01L 21/683 (2006.01); B24B 37/34 (2012.01);
U.S. Cl.
CPC ...
B24B 37/042 (2013.01); B24B 37/08 (2013.01); H01L 21/68707 (2013.01); H01L 21/68 (2013.01); H01L 21/6838 (2013.01); B24B 37/345 (2013.01);
Abstract

To propose a method for realizing appropriate delivering of works to carriers in the conventional transfer process. Specifically, in a polishing method for polishing a work retained in a carrier, at least one carrier for retaining a work to be polished is placed between an upper plate and a lower plate; the work is fit in a hole of the carrier; the carrier and the work are inserted between the upper plate and the lower plate; and at least one of the upper plate and the lower plate is rotated while supplying a polishing agent to a space between the upper plate and the lower plate. In fitting the work in the hole of the carrier, an end portion of the work is held and the work is carried to a position above the lower plate; the work is positioned with respect to the hole of the carrier on the lower plate; and the work is released from the hold and guided by a guide to be slowly carried down toward the hole.


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