The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2014
Filed:
Dec. 07, 2010
Applicants:
Masao Nakayama, Shiojiri, JP;
Hideki Hahiro, Shiojiri, JP;
Inventors:
Masao Nakayama, Shiojiri, JP;
Hideki Hahiro, Shiojiri, JP;
Assignee:
Seiko Epson Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B41J 2/045 (2006.01); H01L 41/09 (2006.01); H01L 41/08 (2006.01); B41J 2/16 (2006.01); H01L 41/332 (2013.01); B41J 2/14 (2006.01); H01L 41/314 (2013.01);
U.S. Cl.
CPC ...
B41J 2/14233 (2013.01); H01L 41/0973 (2013.01); H01L 41/0805 (2013.01); B41J 2/1628 (2013.01); B41J 2/161 (2013.01); B41J 2/1642 (2013.01); H01L 41/332 (2013.01); H01L 41/314 (2013.01); B41J 2/1646 (2013.01); B41J 2/1634 (2013.01); B41J 2/1631 (2013.01);
Abstract
A piezoelectric device includes: a substrate; a first electrode formed over the substrate; a first piezoelectric element formed over the first electrode; a low density region which is formed at a side of the first piezoelectric element and has density lower than that of the first piezoelectric element; a second piezoelectric element which is formed to cover the first piezoelectric element and the low density region; and a second electrode formed over the second piezoelectric element.