The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2014
Filed:
Dec. 07, 2010
Applicant:
Takashi Miyake, Nagaokakyo, JP;
Inventor:
Takashi Miyake, Nagaokakyo, JP;
Assignee:
Murata Manufacturing Co., Ltd., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 3/04 (2006.01); H01L 41/04 (2006.01); H03H 9/58 (2006.01); H01L 41/27 (2013.01); H01L 41/083 (2006.01); H03H 3/02 (2006.01);
U.S. Cl.
CPC ...
H03H 3/04 (2013.01); H03H 2003/025 (2013.01); H03H 9/584 (2013.01); H03H 9/588 (2013.01); H03H 2003/0442 (2013.01); H01L 41/27 (2013.01); H03H 9/589 (2013.01); H03H 3/02 (2013.01); H01L 41/083 (2013.01); H03H 2003/0421 (2013.01); H03H 2003/0435 (2013.01); H03H 2003/023 (2013.01); H03H 2003/0428 (2013.01);
Abstract
A method of manufacturing a stacked thin film piezoelectric filter includes the steps of forming a lower thin film piezoelectric resonator on a substrate, measuring a frequency of the lower thin film piezoelectric resonator and adjusting the frequency, forming an acoustic coupling layer on the lower thin film piezoelectric resonator whose frequency has been adjusted, forming the stacked thin film piezoelectric filter by forming an upper thin film piezoelectric resonator on the acoustic coupling layer, and measuring a frequency of the upper thin film piezoelectric resonator and adjusting the frequency.