The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2014
Filed:
May. 28, 2008
David D. L. Wijngaards, Tegelen, NL;
Hans Reinten, Velden, NL;
Hendrik J. Stolk, Bergen, NL;
Alex N. Westland, Baarlo, NL;
David D. L. Wijngaards, Tegelen, NL;
Hans Reinten, Velden, NL;
Hendrik J. Stolk, Bergen, NL;
Alex N. Westland, Baarlo, NL;
Oce-Technology B.V., Venlo, NL;
Abstract
A method of forming an array of piezoelectric actuators on a membrane () which includes the steps of preparing a piezoelectric comb-like structure having an array of islands that are integrally connected by a continuous top portion and that form piezoelectric layers of the actuators, the islands having an electrode at a bottom side, attaching the comb-like structure with its bottom electrode to a surface of the membrane, removing the continuous top portion of the comb-like structure to thereby separate the actuators from one another, and forming top electrodes on the top surfaces of the piezoelectric layers of the actuators.